High-Throughput Multi-Plume Pulsed-Laser Deposition for Materials Exploration and Optimization. (September 2015)
- Record Type:
- Journal Article
- Title:
- High-Throughput Multi-Plume Pulsed-Laser Deposition for Materials Exploration and Optimization. (September 2015)
- Main Title:
- High-Throughput Multi-Plume Pulsed-Laser Deposition for Materials Exploration and Optimization
- Authors:
- Mao, Samuel S.
Zhang, Xiaojun - Abstract:
- ABSTRACT: A high-throughput multi-plume pulsed-laser deposition (MPPLD) system has been demonstrated and compared to previous techniques. Whereas most combinatorial pulsed-laser deposition (PLD) systems have focused on achieving thickness uniformity using sequential multilayer deposition and masking followed by post-deposition annealing, MPPLD directly deposits a compositionally varied library of compounds using the directionality of PLD plumes and the resulting spatial variations of deposition rate. This system is more suitable for high-throughput compound thin-film fabrication.
- Is Part Of:
- Engineering. Volume 1:Number 3(2015)
- Journal:
- Engineering
- Issue:
- Volume 1:Number 3(2015)
- Issue Display:
- Volume 1, Issue 3 (2015)
- Year:
- 2015
- Volume:
- 1
- Issue:
- 3
- Issue Sort Value:
- 2015-0001-0003-0000
- Page Start:
- 367
- Page End:
- 371
- Publication Date:
- 2015-09
- Subjects:
- pulsed-laser deposition -- high-throughput
Engineering -- Periodicals
Engineering -- China -- Periodicals
620.005 - Journal URLs:
- http://www.sciencedirect.com/science/journal/20958099 ↗
http://www.sciencedirect.com/ ↗ - DOI:
- 10.15302/J-ENG-2015065 ↗
- Languages:
- English
- ISSNs:
- 2095-8099
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store - Ingest File:
- 9891.xml