Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection. (26th February 2019)

• Record Type: Journal Article
• Authors: Takahashi, Kazuhiro; Fujie, Toshinori; Teramoto, Reina; Takahashi, Isao; Sato, Nobutaka; Takeoka, Shinji; Sawada, Kazuaki
• Is Part Of: MRS communications. Volume 9:Number 1(2019)
• Page Start: 381
• Page End: 389
• Publication Date: 2019-02-26
• Subjects: Materials -- Periodicals; 620.11
• DOI: 10.1557/mrc.2019.11
• Languages: English
• ISSNs: 2159-6859

Abstract

Abstract: Abstract : We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young's modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or high-temperature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.