Simple fabrication of nanogratings using flexible polydimethylsiloxane film. (18th February 2019)

• Record Type: Journal Article
• Authors: Zhang, Yaoju; He, Xin; Jiang, Tao; Zhuang, Youyi; Fang, Chaolong
• Is Part Of: Japanese journal of applied physics. Volume 58:Number 3(2019)
• Publication Date: 2019-02-18
• Subjects: nanogratings -- contracting PDMS -- Laser beam lithography -- low-cost; Physics -- Periodicals; 621.05
• DOI: 10.7567/1347-4065/aafd71
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: The fabrication of nanogratings usually requires expensive equipment such as electron beam lithography. Here, a novel and simple method of fabricating nanogratings is presented by contracting the prestretched polydimethylsiloxane (PDMS) substrate adhered a unstretched PDMS micrograting film which is obtained by replicating the template fabricated from less expensive laser beam lithography. Additionally, a PDMS gradient-pitch nanograting is successfully fabricated by adhering a unstretched micrograting PDMS film onto a prestretched wedge-shaped PDMS substrate. The proposed method shows great promise in optical applications requiring cost-effective and accurate nanogarings and filters.