Active vibration isolation of macro–micro motion stage disturbances using a floating stator platform. (13th October 2015)

• Record Type: Journal Article
• Authors: Zhang, Lufan; Long, Zhili; Cai, Jiandong; Liu, Yang; Fang, Jiwen; Wang, Michael Yu
• Is Part Of: Journal of sound and vibration. Volume 354(2015)
• Page Start: 13
• Page End: 33
• Publication Date: 2015-10-13
• Subjects: Active vibration isolation -- Macro–micro motion stage -- Floating stator platform -- Fixed stator platform; Sound -- Periodicals; Vibration -- Periodicals; Son -- Périodiques; Vibration -- Périodiques; Sound; Vibration; Periodicals; Electronic journals; 620.205
• DOI: 10.1016/j.jsv.2015.06.024
• Languages: English
• ISSNs: 0022-460X

Abstract

Abstract: Macro–micro motion stage is mainly applied in microelectronics manufacturing to realize a high-acceleration, high-speed and nano-positioning motion. The high acceleration and nano-positioning accuracy would be influenced by the vibration of the motion stage. In the paper, a concept of floating stage is introduced in the macro–micro motion for isolating vibration disturbances. The design model of the floating stage is established and its theoretical analyses including natural frequency, transient and frequency response analyses are investigated, in order to demonstrate the feasibility of the floating stator platform as a vibration isolator for the macro–micro motion stage. Moreover, an optimal design of the floating stator is conducted and then verified by experiments. In order to characterize and quantify the performance of isolation obtained from the traditional fixed stator and the floating stator, the acceleration responses at different accelerations, speeds and displacements are measured in x, y and z directions. The theoretical and experimental analyses in time and frequency domains indicate that the floating stator platform is effective to actively isolate the vibration in the macro–micro motion stage. Graphical abstract: The schematic of floated stator In macro–micro motion stage, high acceleration motion is provided by VCM. Vibration is induced from VCM, that is, VCM is a source system, the vibration response or force is felt by a receiver system. Generally, VCM is fixed on the base, which means that the base is the receiver system which absorbs or transfers the vibration. However, the vibration cannot completely disappear and the base vibration is inevitable. In the paper, a floated stator platform as isolation system is developed to decrease or isolate vibration between VCM and base. The floated stator platform consists of damper, stopper, floated lock, spring, limiter, sub base, etc. Unlike the traditional stator of VCM fixed on the base, the floated stator can be moved on the linear guide under vibration force or driven force. The springs are used to buffer shock at both end of the floated stator and the dampers are applied to absorb vibration before and after the floated stator. Limiter and stopper prevent the damper from impact damage in the linear direction. The springs and dampers form a spring-damping system, as shown in above figure. When VCM provides a large driven force transiently for high acceleration motion, the impact force or unpredictable vibration would be absorbed or decreased through the floated stator platform. The vibration of base will be weakened or eliminated and this can assure positional accuracy of grating ruler read head on positioning platform and others. Highlights: This paper proposes a floated stator platform used in the macro–micro motion stage for isolating a disturbance source. The floated stator platform is described in detail firstly and its theoretical analyses consisting of normal frequency, transient response and frequency response analyses are investigated to demonstrate the feasibility of the floated stator platform as a vibration isolator for the macro–micro motion stage. The feasibility is tested by experimental investigations. Both the time and frequency domain analysis of test data indicate that the floated stator platform is quite effective to actively isolate the vibration in macro–micro motion stage. The results suggest that this floated stator platform is capable of mitigating the vibration.