Polyelemental Nanolithography via Plasma Ion Bombardment: From Fabrication to Superior H2 Sensing Application. Issue 6 (14th December 2018)

• Record Type: Journal Article
• Authors: Jung, Woo‐Bin; Cho, Soo‐Yeon; Suh, Bong Lim; Yoo, Hae‐Wook; Jeon, Hwan‐Jin; Kim, Jihan; Jung, Hee‐Tae
• Is Part Of: Advanced materials. Volume 31:Issue 6(2019)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2018-12-14
• Subjects: gas sensors -- multi‐metals -- nanopatterns -- nanostructures -- polyelements; Materials -- Periodicals; Chemical vapor deposition -- Periodicals; 620.11
• DOI: 10.1002/adma.201805343
• Languages: English
• ISSNs: 0935-9648

Abstract

Abstract: The development of complex nanostructures containing a homo‐ and heteromixture of two or more metals is a considerable challenge in nanotechnology. However, previous approaches are considerably limited to the number of combinations of metals depending on the compatibility of elements, and to the complex shape control of the nanostructure. In this study, a significant step is taken toward resolving these limitations via the utilization of a low‐energy argon‐ion bombardment. The multilayer films are etched and re‐sputtered on the sidewall of the pre‐pattern, which is a secondary sputtering phenomenon. In contrast to the precursor mixing method, most metallic combinations can be fabricated. The degree of mixing is tuned by the control of the sequence and thickness of multilayers. In addition, the feature shape and dimensions are controlled by changing the pre‐pattern or by controlling the ion‐beam angle. Using this method, the shortest response time (2 s to 1% H2 ) in comparison with those of Pd‐based H2 sensors reported previously and a limit of detection below 1 parts per million (ppm) for Pd/Au and Pd/Pt bimetallic line arrays are achieved. This study is expected to realize a family of polyelements that can be used in various applications. Abstract : A general method for polyelemental nanopatterning is developed by using low‐energy Ar + plasma. This method is not restricted to the selection of elements and their combination, and complex shapes and arrays with high‐resolution (≈10 nm) and tunable inner structures can be achieved. Using a Pd–Au nanopattern for a hydrogen gas sensor, the fastest sensing speed is observed.