Imaging of electronical and magnetic properties on sub-10 nanometer scale with scanning force microscopy in ambient. Issue 191 (24th July 2018)

• Record Type: Journal Article
• Authors: Ding, Xidong; Luo, Yongzhen; Shen, Han; Cai, Zhigang; Wu, Yixiao; Chen, Dihu
• Is Part Of: Integrated ferroelectrics. Issue 191(2018)
• Page Start: 92
• Page End: 103
• Publication Date: 2018-07-24
• Subjects: Scanning force microscopy -- electronical property -- magnetic property -- multi-frequency method; Ferroelectric devices -- Periodicals; Integrated circuits -- Periodicals; 537.244805
• DOI: 10.1080/10584587.2018.1457374
• Languages: English
• ISSNs: 1058-4587

Abstract

ABSTRACT: Limited by applicable force-detection techniques, imaging of electronical or magnetic properties on sub-10 nanometer scale with scanning force microscopy in ambient is challenging in experiment and equivocal in theory. In this paper, the multi-frequency method in AFM is employed to improve the lateral resolution of electrostatic force microscopy (EFM) and the sensitivity of magnetic force microscopy (MFM) under ambient conditions. A lateral resolution of sub-10 nm for EFM and a sensitivity that is superior to conventional MFM in lift mode are demonstrated experimentally. The mechanism of these techniques, which is attributed to the multi-frequency method and the reduced effective tip-sample distance, is also elucidated. The developed technique can be easily integrated to measure in situ both the electronical properties and the magnetic properties on sub-10 nanometer scale for optoelectronic materials.