Hydrothermal synthesis and characterization of In2O3-ZnGa2O4 nanocomposites and their application in IGZO ceramics. Issue 4 (March 2019)

• Record Type: Journal Article
• Authors: Liu, Yang; Zhang, Yu; Qiu, Chen; Qi, Chao; Sun, Benshuang; Zeng, Xueyun; Zhu, Jinpeng; Shu, Yongchun; He, Jilin
• Is Part Of: Ceramics international. Volume 45:Issue 4(2019)
• Page Start: 4381
• Page End: 4391
• Publication Date: 2019-03
• Subjects: IGZO -- Nanocomposites -- Crystal structure -- Ceramics; Ceramics -- Periodicals; Céramique industrielle -- Périodiques; Ceramics; Periodicals; Electronic journals; 666
• DOI: 10.1016/j.ceramint.2018.11.113
• Languages: English
• ISSNs: 0272-8842

Abstract

Abstract: Poly-crystalline In2 O3 -ZnGa2 O4 nanocomposites were successfully synthesized by hydrothermal method with a mixed solution of In, Ga and Zn nitrates with equal mole ratio (In: Ga: Zn=1:1:1) and the ammonia was used as the precipitant. The effects of hydrothermal temperature and pH value of the mixed solution on the properties of the nanocomposites were investigated. The microstructure of the prepared In2 O3 -ZnGa2 O4 nanocomposites was characterized by SEM and TEM, respectively. The growth mechanisms of In2 O3 -ZnGa2 O4 nanocomposites were also preliminarily discussed in this study. Results reveal that the IGZO ceramics prepared by In2 O3 -ZnGa2 O4 nanocomposites own a high relative density of 99.5% and low resistivity of 1.2 mΩ·cm, which can be applied to the preparation of IGZO thin film with superior performance.