1.3 μm 10‐Wavelength Laterally Coupled Distributed Feedback Laser Array with High‐Duty‐Ratio Gratings. Issue 1 (22nd August 2018) - Li, Ankang
Abstract : A 1.3 µm 10‐wavelength laterally coupled distributed feedback (LC‐DFB) laser array is realized by high‐duty‐ratio lateral gratings along both sides of the ridges on one AlGaInAs multiple quantum well (MQW) epi‐wafer for Fabry–Perot lasers. The coupling coefficient is enhanced by adjusting the depth and duty ratio of lateral grating, and CH4 /H2 /Ar reactive ion etching (RIE) which provides high selectivity between InP and AlInAs is adopted for precise control of the grating depth. The stable single‐mode operation of 10 wavelengths is demonstrated with the mean wavelength spacing of ≈3.4 nm and the average side mode suppression ratio (SMSR) ≈40.8 dB. Abstract : A 1.3 μm 10‐wavelength laterally coupled distributed feedback (LC‐DFB) laser array is realized by high‐duty‐ratio lateral gratings on one AlGaInAs multiple quantum well (MQW) epi‐wafer. The stable single‐mode operation of 10 wavelengths is demonstrated with the mean wavelength spacing of ≈3.4 nm and the average side mode suppression ratio (SMSR) ≈40.8 dB.