An ultrasensitive spintronic strain‐gauge sensor and a spin‐MEMS microphone. Issue 2 (26th December 2018)

• Record Type: Journal Article
• Authors: Fuji, Yoshihiko; Hara, Michiko; Higashi, Yoshihiro; Kaji, Shiori; Masunishi, Kei; Nagata, Tomohiko; Yuzawa, Akiko; Otsu, Kenji; Okamoto, Kazuaki; Baba, Shotaro; Ono, Tomio; Hori, Akio; Fukuzawa, Hideaki
• Is Part Of: Electronics and communications in Japan. Volume 102:Issue 2(2019)
• Page Start: 48
• Page End: 54
• Publication Date: 2018-12-26
• Subjects: gauge factor -- magnetostriction -- microphone -- MTJ -- spintronics -- strain gauge; Electronics -- Periodicals; Telecommunication -- Periodicals; 621.6805
• DOI: 10.1002/ecj.12138
• Languages: English
• ISSNs: 1942-9533

Abstract

Abstract: This review provides the spintronic strain‐gauge sensor (Spin‐SGS) based on a magnetic tunnel junction (MTJ) with a high gauge factor in excess of 5000, which was realized by adopting a novel amorphous Fe‐B‐based sensing layer with high magnetostriction and low coercivity in a high magnetoresistance Mg‐O barrier MTJ. This review also provides a demonstration of novel "Spintronic MEMS (Spin‐MEMS) microphone, " in which a series of Spin‐SGSs are integrated onto a bulk micromachined diaphragm. The Spin‐MEMS microphone exhibits a signal‐to‐noise ratio (SNR) of 57 dB(A) due to the high strain sensitivity of the Spin‐SGSs.