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HARVARD Citation
Evers, E. et al. (2019). Beyond decentralized wafer/reticle stage control design: A double-Youla approach for enhancing synchronized motion. Control engineering practice. pp. 21-32. [Online].
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Evers, E. et al. (2019). Beyond decentralized wafer/reticle stage control design: A double-Youla approach for enhancing synchronized motion. Control engineering practice. pp. 21-32. [Online].