Multistability of cantilever MEMS/NEMS switches induced by electrostatic and surface forces. (October 2017)

• Record Type: Journal Article
• Authors: Kalafut, Devin; Bajaj, Anil; Raman, Arvind
• Is Part Of: International journal of non-linear mechanics. Volume 95(2017)
• Page Start: 209
• Page End: 215
• Publication Date: 2017-10
• Subjects: Multistability -- MEMS/NEMS -- Continuation -- Bifurcation -- Uncertainty quantification; Nonlinear mechanics -- Periodicals; Mécanique non linéaire -- Périodiques; Nonlinear mechanics; Periodicals; 531
• DOI: 10.1016/j.ijnonlinmec.2017.06.009
• Languages: English
• ISSNs: 0020-7462

Abstract

Abstract: MEMS/NEMS switches are used in a variety of portable electronics and RF telecommunications systems. MEMS/NEMS switches are ideally bi-stable, with one ON and one OFF state and a reliable switching between the two induced by electrical actuation. Presented herein is an exploration into non-ideal behavior, i.e. tri-stability, and parametric sensitivity of a generalization of cantilever MEMS/NEMS switches. The representative system model employs multiphysics features based on Euler–Bernoulli beam theory, parallel plate capacitance for electrostatics, and a Lennard-Jones form of surface interaction. The geometry, material properties, and surface features of the device are condensed into just a few dimensionless quantities, creating a parameter space of low enough dimensionality to provide accessible representations of all system equilibria within physically relevant ranges. Analysis of this system model offers insight regarding conditions necessary for bi- and tri-stability in such systems, which are crucial for informing studies on switching dynamics and various device performance metrics.