A Quantum Chemical Descriptor for CVD Precursor Design: Predicting Decomposition Rates of TBP and TBAs Isomers and Derivatives1. Issue 7 (September 2015)
- Record Type:
- Journal Article
- Title:
- A Quantum Chemical Descriptor for CVD Precursor Design: Predicting Decomposition Rates of TBP and TBAs Isomers and Derivatives1. Issue 7 (September 2015)
- Main Title:
- A Quantum Chemical Descriptor for CVD Precursor Design: Predicting Decomposition Rates of TBP and TBAs Isomers and Derivatives1
- Authors:
- Stegmüller, Andreas
Tonner, Ralf - Abstract:
- Abstract : Easily accessible information from quantum chemical computations can be used to predict decomposition barriers for phosphorous and arsenic precursor molecules for CVD. Based on the mechanistic description of the β ‐hydrogen elimination reaction, a precursor with a very low decomposition barrier is suggested.
- Is Part Of:
- Chemical vapor deposition. Volume 21:Issue 7/9(2015:Sep.)
- Journal:
- Chemical vapor deposition
- Issue:
- Volume 21:Issue 7/9(2015:Sep.)
- Issue Display:
- Volume 21, Issue 7/9 (2015)
- Year:
- 2015
- Volume:
- 21
- Issue:
- 7/9
- Issue Sort Value:
- 2015-0021-NaN-0000
- Page Start:
- 161
- Page End:
- 165
- Publication Date:
- 2015-09
- Subjects:
- Precursor design -- density functional theory -- Gas‐phase reactions -- beta‐hydrogen elimination -- partial charges
Chemical vapor deposition -- Periodicals
671.735 - Journal URLs:
- http://onlinelibrary.wiley.com/ ↗
- DOI:
- 10.1002/cvde.201504332 ↗
- Languages:
- English
- ISSNs:
- 0948-1907
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 3152.800000
British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store - Ingest File:
- 9065.xml