Thermal conductivity measurements of high and low thermal conductivity films using a scanning hot probe method in the 3ω mode and novel calibration strategies. Issue 37 (3rd September 2015)

• Record Type: Journal Article
• Authors: Wilson, Adam A.; Muñoz Rojo, Miguel; Abad, Begoña; Perez, Jaime Andrés; Maiz, Jon; Schomacker, Jason; Martín-Gonzalez, Marisol; Borca-Tasciuc, Diana-Andra; Borca-Tasciuc, Theodorian
• Is Part Of: Nanoscale. Volume 7:Issue 37(2015)
• Page Start: 15404
• Page End: 15412
• Publication Date: 2015-09-03
• Subjects: Nanoscience -- Periodicals; Nanotechnology -- Periodicals; 620.505
• DOI: 10.1039/c5nr03274a
• Languages: English
• ISSNs: 2040-3364

Abstract

Abstract : The thermal conductivity of films is measured using a scanning hot probe method and the calibration of thermal contact parameters is investigated. Abstract : This work discusses measurement of thermal conductivity ( k ) of films using a scanning hot probe method in the 3 ω mode and investigates the calibration of thermal contact parameters, specifically the thermal contact resistance ( R thC) and thermal exchange radius ( b ) using reference samples with different thermal conductivities. R thC and b were found to have constant values (with b = 2.8 ± 0.3 μm and R thc = 44 927 ± 7820 K W −1 ) for samples with thermal conductivity values ranging from 0.36 W K −1 m −1 to 1.1 W K −1 m −1 . An independent strategy for the calibration of contact parameters was developed and validated for samples in this range of thermal conductivity, using a reference sample with a previously measured Seebeck coefficient and thermal conductivity. The results were found to agree with the calibration performed using multiple samples of known thermal conductivity between 0.36 and 1.1 W K −1 m −1 . However, for samples in the range between 16.2 W K −1 m −1 and 53.7 W K −1 m −1, calibration experiments showed the contact parameters to have considerably different values: R thc = 40 191 ± 1532 K W −1 and b = 428 ± 24 nm. Finally, this work demonstrates that using these calibration procedures, measurements of both highly conductive and thermally insulating films on substrates can be performed, as the measured values obtained were within 1–20% (for low k ) and 5–31% (for high k ) of independent measurements and/or literature reports. Thermal conductivity results are presented for a SiGe film on a glass substrate, Te film on a glass substrate, polymer films (doped with Fe nano-particles and undoped) on a glass substrate, and Au film on a Si substrate.