Manufacturing PDMS micro lens array using spin coating under a multiphase system. (5th April 2017)

• Record Type: Journal Article
• Authors: Sun, Rongrong; Yang, Hanry; Rock, D Mitchell; Danaei, Roozbeh; Panat, Rahul; Kessler, Michael R; Li, Lei
• Is Part Of: Journal of micromechanics and microengineering. Volume 27:Number 5(2017:May)
• Publication Date: 2017-04-05
• Subjects: micro lens array -- spin coating -- PDMS; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/1361-6439/aa68c8
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: The development of micro lens arrays has garnered much interest due to increased demand of miniaturized systems. Traditional methods for manufacturing micro lens arrays have several shortcomings. For example, they require expensive facilities and long lead time, and traditional lens materials (i.e. glass) are typically heavy, costly and difficult to manufacture. In this paper, we explore a method for manufacturing a polydimethylsiloxane (PDMS) micro lens array using a simple spin coating technique. The micro lens array, formed under an interfacial tension dominated system, and the influence of material properties and process parameters on the fabricated lens shape are examined. The lenses fabricated using this method show comparable optical properties—including surface finish and image quality—with a reduced cost and manufacturing lead time.