A thin film thermoelectric device fabricated by a self-aligned shadow mask method. (23rd March 2017)

• Record Type: Journal Article
• Authors: Yang, Fanglong; Zheng, Shuqi; Wang, Hanfu; Chu, Weiguo; Dong, Yuhua
• Is Part Of: Journal of micromechanics and microengineering. Volume 27:Number 5(2017:May)
• Publication Date: 2017-03-23
• Subjects: shadow mask -- thin film -- thermoelectric device -- thermopile sensor -- thermal evaporation; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/1361-6439/aa64a3
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: A planar thermoelectric device with 20 pairs of Sb2 Te3 and Bi2 Te3 thin-film legs was fabricated by using a facile self-aligned shadow mask method in combination with a thermal evaporation process. Effects of substrate temperature during the evaporation process on the Seebeck coefficient and electrical conductivity of the thin films have been investigated. The maximum Seebeck coefficient was found to be 158 µ V K −1 for the Sb2 Te3 film produced at 260 °C and −148 µ V K −1 for the Bi2 Te3 film produced at 230 °C. The device was fabricated on a glass substrate under the above optimal conditions. At a temperature difference of 90 K, it demonstrated an open-circuit voltage of more than 0.5 V (which was equivalent of a sensitivity of 5.40 mV K −1 ) and a maximum output power of 1.105 µ W.