Thermodynamic analysis on deposition of SiBCN ceramic by low pressure chemical vapor deposition/infiltration from SiCH3Cl3BCl3NH3H2Ar system. Issue 15 (November 2016)

• Record Type: Journal Article
• Authors: Dong, Ning; Chai, Nan; Liu, Yongsheng; Liu, Xiaofei; Qin, Hailong; Yin, Xiaowei; Zhang, Litong; Cheng, Laifei
• Is Part Of: Journal of the European Ceramic Society. Volume 36:Issue 15(2016)
• Page Start: 3581
• Page End: 3591
• Publication Date: 2016-11
• Subjects: Thermodynamic analysis -- Low pressure chemical vapor deposition/infiltration -- Siliconboron carbonitride ceramic -- Experimental verification; Ceramic materials -- Periodicals; Composite materials -- Periodicals; Matériaux céramiques -- Périodiques; Composites -- Périodiques; Ceramic materials; Composite materials; Periodicals; Electronic journals; 666.05
• DOI: 10.1016/j.jeurceramsoc.2016.05.030
• Languages: English
• ISSNs: 0955-2219

Abstract

Abstract: In order to guide the kinetic deposition experiments of siliconboron carbonitride ceramics (SiBCN) from SiCl3 CH3 NH3 BCl3 H2 Ar system, the thermodynamic calculation was undertaken using Factsage software. Predominant condensed phases at equilibrium were SiC, Si3 N4, BN, B4 C and C. The area of phase regions was affected by deposition parameters, such as temperature, total pressure, dilute H2 ratio, nCH3SiCl3 /(nNH3 + nBCl3 ) and nNH3 /(nNH3 + nBCl3 ). The results showed that SiBCN ceramics with desired phases, such as C + SiC + BN, could be obtained via this system by controlling above parameters theoretically. Kinetic verification at 900 °C demonstrated that SiBCN ceramic could be obtained by low pressure chemical vapor deposition/infiltration from this system. The deposition was amorphous from XRD spectra and mainly constituted by CC, SiN and SiC bonds from XPS analysis, which was in agreement with the results of thermodynamic calculation in general.