Microfabrication with smooth thin carbon nanotube composite sheets. (22nd March 2017)

• Record Type: Journal Article
• Authors: Boyer, Nathan; Pei, Lei; Rowley, Joseph; Syme, Derric; Liddiard, Steven; Abbott, Jonathan; Larson, Kyle; Liang, Zhiyong; Iverson, Brian; Vanfleet, Richard; Davis, Robert
• Is Part Of: Materials research express. Volume 4:Number 3(2017)
• Publication Date: 2017-03-22
• Subjects: carbon nanotubes -- composite materials -- microfabrication -- patterning -- carbon nanotube composites -- MEMS -- plasma etching; Materials science -- Research -- Periodicals; Materials science -- Periodicals; 620.11
• DOI: 10.1088/2053-1591/aa55a4
• Languages: English
• ISSNs: 2053-1591

Abstract

Abstract: Carbon nanotube (CNT)/polymer composite materials can be high strength, stiff, and lightweight, which makes them attractive for fabrication of micromechanical structures. Here we demonstrate a method whereby smooth, thin, high CNT concentration composite sheets can be fabricated and patterned on the microscale using a process of photolithography and plasma etching. Two types of CNT/polymer composite sheets were fabricated: one made from CNTs grown on patterned supported catalyst and one made from CNTs grown with floating catalyst; these had thicknesses of 6 µ m and 26 µ m respectively and a roughness of less than 60 nm.