Fatigue and fracture mechanics aspects of LIGA fabricated nickel and Ni-20%Fe microstructures. (8th June 2010)

• Record Type: Journal Article
• Authors: Williams, John D.
• Is Part Of: International journal of theoretical and applied multiscale mechanics. Volume 1:Number 3(2010)
• Page Start: 266
• Page End: 279
• Publication Date: 2010-06-08
• Subjects: LIGA -- electroplated nickel microstructure -- nickel-iron microstructure -- MEMS fatigue -- MEMS fracture mechanics -- microelectromechanical systems -- fatigue life -- stress intensity factors -- initial crack length -- plastic zone; Mechanics, Applied -- Periodicals; 620.112305
• Languages: English
• ISSNs: 1755-9995

Abstract

This work is used to determine fracture mechanics properties and fatigue life of electroplated nickel and nickel-iron microstructures used in Micro Electro Mechanical Systems (MEMS) applications from published tensile test data. Calculations of the stress intensity factor, the initial crack length of the plastic zone, and predictions of fatigue life for micro structured nickel and Ni-20 %Fe are presented. The goal of this effort is to provide a theoretical approach that will allow for the future development of an industrial standard to predict the fatigue life of MEMS components.