2D and 3D growth of carbon nanotubes on substrates, from nanometre to millimetre scales. (28th April 2008)

• Record Type: Journal Article
• Authors: Hart, A. John; Taylor, Hayden K.; Slocum, Alexander H.
• Is Part Of: International journal of nanomanufacturing. Volume 1:Number 6(2007)
• Page Start: 701
• Page End: 709
• Publication Date: 2008-04-28
• Subjects: carbon nanotubes -- CNTs -- nanostructures -- growth -- chemical vapour deposition -- CVD -- dry embossing -- microfabrication -- patterning -- silicon microstructures -- moulding -- electron beam evaporation -- thin films -- nanomanufacturing -- nanotechnology; Nanostructured materials industry -- Periodicals; Nanotechnology -- Periodicals; 620.505
• Languages: English
• ISSNs: 1746-9392

Abstract

This paper presents a suite of techniques for making Carbon Nanotube (CNT) assemblies having hierarchical two- and three-dimensional organisation: conformal films of tangled single-walled CNTs are grown on silicon microstructures, millimetre-thick films and microstructures of aligned Multi-wall CNTs (MWNTs) are grown on flat silicon substrates, large-area CNT micropatterns are fabricated by post-growth dry embossing of aligned CNT films and 3D forms of CNTs are directly grown to take the shape of microfabricated template. These growth processes use catalyst thin-films deposited by electron beam evaporation and atmospheric-pressure thermal Chemical Vapour Deposition (CVD), which is scalable from academic-level prototyping to industrial-level manufacturing.