Buckled diamond-like carbon nanomechanical resonators. Issue 35 (18th August 2015)

• Record Type: Journal Article
• Authors: Tomi, Matti; Isacsson, Andreas; Oksanen, Mika; Lyashenko, Dmitry; Kaikkonen, Jukka-Pekka; Tervakangas, Sanna; Kolehmainen, Jukka; Hakonen, Pertti J.
• Is Part Of: Nanoscale. Volume 7:Issue 35(2015)
• Page Start: 14747
• Page End: 14751
• Publication Date: 2015-08-18
• Subjects: Nanoscience -- Periodicals; Nanotechnology -- Periodicals; 620.505
• DOI: 10.1039/c5nr02820e
• Languages: English
• ISSNs: 2040-3364

Abstract

Abstract : Conducting diamond-like carbon is a promising material for high-frequency nanoelectromechanical resonators. Using buckled films increases the frequency tuning of the resonator, which can be of advantage in rf applications. Abstract : We have developed capacitively-transduced nanomechanical resonators using sp 2 -rich diamond-like carbon (DLC) thin films as conducting membranes. The electrically conducting DLC films were grown by physical vapor deposition at a temperature of 500 °C. Characterizing the resonant response, we find a larger than expected frequency tuning that we attribute to the membrane being buckled upwards, away from the bottom electrode. The possibility of using buckled resonators to increase frequency tuning can be of advantage in rf applications such as tunable GHz filters and voltage-controlled oscillators.