A MEMS coupled resonator for frequency filtering in air. (December 2018)

• Record Type: Journal Article
• Authors: Ilyas, Saad; Jaber, Nizar; Younis, Mohammad I.
• Is Part Of: Mechatronics. Volume 56(2018)
• Page Start: 261
• Page End: 267
• Publication Date: 2018-12
• Subjects: Coupled resonator -- Clamped–clamped beam -- Filter -- Mixed-source excitation -- Squeeze film damping -- Surface micromachining; Computer integrated manufacturing systems -- Periodicals; Flexible manufacturing systems -- Periodicals; Mechatronics -- Periodicals; Productique -- Périodiques; Fabrication, Systèmes flexibles de -- Périodiques; Mécatronique -- Périodiques; Computer integrated manufacturing systems; Flexible manufacturing systems; Mechatronics; Periodicals; 629.89
• DOI: 10.1016/j.mechatronics.2018.01.002
• Languages: English
• ISSNs: 0957-4158

Abstract

Abstract: We present design, fabrication, and characterization of a mechanically coupled MEMS H resonator capable of performing simultaneous mechanical amplification and filtering in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multi-layer surface micromachining process. A special fabrication process and device design is employed to enable operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter for low frequency applications. It is demonstrated that through the multi-source harmonic excitation and the operation in air, an improved band-pass filter with flat response and minimal ripples can be achieved.