Flexible Metal/Oxide/Metal Transparent Electrodes Made of Thermally Evaporated MoO3/Ag/MoO3 for Thin Film Heaters. Issue 23 (23rd September 2018)

• Record Type: Journal Article
• Authors: Park, Jin‐Yeong; Kim, Han‐Ki
• Is Part Of: Physica status solidi. Volume 215:Issue 23(2018)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2018-09-23
• Subjects: electrodes -- MoO3/Ag/MoO3 -- thermal evaporation -- thin film heaters; Solid state physics -- Periodicals; Solids -- Industrial applications -- Periodicals; 530.41
• DOI: 10.1002/pssa.201800674
• Languages: English
• ISSNs: 1862-6300

Abstract

Abstract : The authors report on thermally‐evaporated MoO3 /Ag/MoO3 multilayer films as a flexible and transparent electrode for high performance flexible thin film heaters (TFHs). Using thermal evaporation, the authors obtain highly flexible MoO3 /Ag/MoO3 multilayer films on colorless polyimide substrate without plasma damage. To optimize the thickness of the Ag interlayer, the authors investigate the electrical, optical, morphological, and mechanical properties of MoO3 /Ag/MoO3 multilayers as a function of Ag interlayer thickness. Based on a figure of merit value, the authors obtain an optimal MoO3 /Ag/MoO3 electrode with a low sheet resistance of 3.17 Ohm/square, a high optical transmittance of 77.85%, and critical bending radius of 1 mm, which are acceptable for fabrication of TFHs. The flexible TFHs (25 × 25 mm 2 ) fabricated on a thermally evaporated MoO3 /Ag/MoO3 electrode shows a high saturation temperature of 118 °C even at a low input power of 2.5 W (input voltage 2.5 V) due to very low sheet resistance. Successful operation of the flexible TFHs indicate that the thermally‐evaporated MoO3 /Ag/MoO3 film is a promising alternative transparent electrode to substitute sputtered Sn‐doped In2 O3 (ITO) films for highly transparent and flexible TFHs. Abstract : A flexible and transparent thin film heater (TFH) is fabricated on a thermally‐evaporated MoO3 /Ag/MoO3 multilayer electrode on a 50‐µm‐thick CPI substrate. The TFH shows better performance than conventional ITO‐based thin film heaters due to the low resistance and outstanding flexibility of the MoO3 /Ag/MoO3 multilayer.