Role of electric field distribution in local anodic oxidation. (1st January 2013)

• Record Type: Journal Article
• Authors: Hu, Kexiang; Wang, Qingkang; Wangyang, Peihua
• Is Part Of: International journal of nanomanufacturing. Volume 9:Number 5/6(2013)
• Page Start: 496
• Page End: 509
• Publication Date: 2013-01-01
• Subjects: electric field intensity -- nanofabrication -- anodic oxidation -- nanogratings -- nanoscale electrochemical reaction; Nanostructured materials industry -- Periodicals; Nanotechnology -- Periodicals; 620.505
• Languages: English
• ISSNs: 1746-9392

Abstract

Local electric-field-induced anodic oxidation is one of the earliest and most extensively studied techniques in bias-assisted AFM nanolithography. Except the water bridge created between the tip and the sample surface, local anodic oxidation (LAO) process strongly depends on the tip-sample voltage and especially on the electric field distribution under the tip apex centre. Once electric field is formed, its distribution and intensity can be modified by changing the tip-sample voltage and separation. The electric field provides the oxidation kinetics of nanoscale electrochemical reaction and controls the spacial resolution of the fabricated structures. In this paper, the s-wave tip quantum model, the influence of the bias voltage and the electric field strength on oxide structures and the theory of electric-field-induced LAO have been analysed. In addition, dot-array nanogratings, one-dimensional nanogratings and two-dimensional nanogratings are fabricated by using electric-field-induced LAO process with AFM in the ambient atmosphere.