100 μm-size stationary spot machining in elastic emission machining. (1st January 2014)

• Record Type: Journal Article
• Authors: Takei, Yoshinori; Mimura, Hidekazu
• Is Part Of: International journal of nanomanufacturing. Volume 10:Number 3(2014)
• Page Start: 244
• Page End: 253
• Publication Date: 2014-01-01
• Subjects: elastic emission machining -- EEM -- optical fabrication -- smoothing -- figuring -- ultraprecision machining -- spatial resolution -- micro electrical discharge machining -- EDM; Nanostructured materials industry -- Periodicals; Nanotechnology -- Periodicals; 620.505
• Languages: English
• ISSNs: 1746-9392

Abstract

Recently, by using various ultraprecision machining methods, optical devices having both nanometer-level figure accuracy and nanometer-level smoothness have become obtainable. However, improvement of the spatial resolution in figuring is still strongly required, particularly when the shape of optical devices is complicated. We have been developing a figure correction system using elastic emission machining (EEM). In this study, an EEM nozzle head having a minute aperture with a diameter of less than 60 µm was developed. The minute hole was prepared by micro-electrical discharge machining (EDM). A stationary spot profile with a diameter of 100 µm was experimentally obtained. Using the developed nozzle, spatial resolution better than 100 µm is expected to be realised in the EEM figuring system.