Review of MEMS metrology solutions. (23rd January 2008)

• Record Type: Journal Article
• Authors: Nichols, James F.; Shilling, Meghan; Kurfess, Thomas R.
• Is Part Of: International journal of manufacturing technology and management. Volume 13:Number 2-4(2008)
• Page Start: 344
• Page End: 359
• Publication Date: 2008-01-23
• Subjects: MEMS metrology -- microfabrication -- SEM -- scanning electron microscopy -- interferometry -- micro-CMMs -- coordinate measuring machines -- microelectromechanical systems -- microengineering -- MEMS inspection; Manufacturing processes -- Periodicals; Manufacturing processes -- Automation -- Periodicals; Production management -- Periodicals; 670.427068
• Languages: English
• ISSNs: 1368-2148

Abstract

This paper serves as a review of current solutions for MEMS metrology. This survey provides an extensive and in-depth review of the current tools and their fundamental limitations. Techniques that are reviewed include tools that are extensions of semiconductor tools, scaled down versions of conventional metrology tools and entirely novel methods for MEMS inspection.