Cite
HARVARD Citation
Wang, C. et al. (2008). Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon. International journal of manufacturing technology and management. pp. 360-375. [Online].
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Wang, C. et al. (2008). Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon. International journal of manufacturing technology and management. pp. 360-375. [Online].