High Resolution Position Monitoring of Suspended MEMS towards Biological and Chemical Sensors. Issue 1659 (2014)

• Record Type: Journal Article
• Authors: Putrino, G.; Martyniuk, M.; Keating, A.; Dell, J.M.; Faraone, L.
• Is Part Of: MRS proceedings. Issue 1659:(2014)
• Page Start: 9
• Page End: 14
• Publication Date: 2014
• Subjects: microelectro-mechanical (MEMS), -- microelectronics, -- optoelectronic; Electrical engineering -- Congresses; Physics -- Congresses; Materials -- Research -- Congresses; Materials science -- Congresses; 620.11
• DOI: 10.1557/opl.2014.98
• Languages: English
• ISSNs: 0272-9172

Abstract

ABSTRACT: We present an integrated readout technique for interrogating the suspension height of micro-electro-mechanical systems (MEMS) structures. This readout technique is envisaged to be useful in applications such as MEMS-based biological and chemical sensing, where it is necessary to obtain the accurate position of a MEMS beam. The approach is based on the suspended MEMS structure modulating light transmission in an underlying optical waveguide via Fabry-Perrot phenomena. The performance of the technique is predicted via finite difference time domain (FDTD) simulations the results of which are confirmed by experimental measurements.