Submicron displacement measurements of MEMS using optical microphotographs in aqueous media: Enhancement using color image processing. Issue 1659 (2014)

• Record Type: Journal Article
• Authors: Warnat, Stephan; King, Hunter; Schwartz, Rachael; Kujath, Marek; Hubbard, Ted
• Is Part Of: MRS proceedings. Issue 1659:(2014)
• Page Start: 43
• Page End: 48
• Publication Date: 2014
• Subjects: microelectro-mechanical (MEMS), -- actuator, -- biomedical; Electrical engineering -- Congresses; Physics -- Congresses; Materials -- Research -- Congresses; Materials science -- Congresses; 620.11
• DOI: 10.1557/opl.2014.58
• Languages: English
• ISSNs: 0272-9172

Abstract

ABSTRACT: The measurement of precise submicron displacements is essential in several MEMS applications. For instance, the measurement of the mechanical parameters of biological cells requires repeatable measurement of displacements in the nanometer regime. This paper presents a method to make displacement measurements in an aqueous MEMS environment with a ± 10 nm accuracy by using the blue channel of RGB pictures in combination with a FFT phase shift analysis.