Cost Effective MEMS Fabrication of a Thermoelectric Nanowire Characterization Platform (TNCP). (2015)

• Record Type: Journal Article
• Authors: Moosavi, S. Hoda; Kroener, Michael; Woias, Peter
• Is Part Of: Procedia engineering. Volume 120(2015)
• Page Start: 210
• Page End: 214
• Publication Date: 2015
• Subjects: laser machining -- thermoelecrtric nanowire -- characterization platform.; Engineering -- Congresses; Engineering -- Periodicals; Engineering; Conference proceedings; Periodicals; 620.005
• DOI: 10.1016/j.proeng.2015.08.612
• Languages: English
• ISSNs: 1877-7058

Abstract

Abstract: To decrease the cleanroom requirement of a MEMS chip fabrication, Nd:YAG laser machining is integrated into silicon micromachining. However, to get a smooth surface the laser parameters must be chosen carefully, and a subsequent wet chemical etching treatment of the surface is essential. The process is used to fabricate a Thermoelectric Nanowire Characterization Platform (TNCP). Our TNCPs are designed to measure a single nanowire's thermoelectric properties: heat and electrical conduction, and the Seebeeck coefficient. Furthermore it has the unique ability to also study the crystallographic structure of these nanowires by transmission electron microscopy (TEM).