Locally Grown SnO2 NWs as Low Power Ammonia Sensor. (2015)

• Record Type: Journal Article
• Authors: Samà, Jordi; Barth, Sven; Jiménez-Díaz, Román; Prades, Juan-Daniel; Casals, Olga; Gracia, Isabel; Cané, Carles; Romano-Rodríguez, Albert
• Is Part Of: Procedia engineering. Volume 120(2015)
• Page Start: 215
• Page End: 219
• Publication Date: 2015
• Subjects: Nanowires -- Metal-oxide -- Gas-sensor -- Micromembrane -- Low-Power consumption; Engineering -- Congresses; Engineering -- Periodicals; Engineering; Conference proceedings; Periodicals; 620.005
• DOI: 10.1016/j.proeng.2015.08.614
• Languages: English
• ISSNs: 1877-7058

Abstract

Abstract: Localized growth of SnO2 nanowires on top of CMOS compatible micromembranes that incorporate a buried heater and prepatterned interdigitated electrodes has been achieved that presents the advantage that it allows to easily and directly integrate the advantageous properties of quasi-one dimensional structures in an advanced electronic device by a Vapor Liquid Solid (VLS) mechanism. A NWs based sensor of this type is characterized as a low power gas sensor towards NH3 at different temperatures. Stable and reproducible response is obtained, that allows detecting concentrations below the time-weighted average exposure limit for 8 h.