F‐ and Cl‐terminations of (100)‐oriented single crystalline diamond. Issue 10 (22nd September 2014)

• Record Type: Journal Article
• Authors: Widmann, C. J.; Giese, C.; Wolfer, M.; Kono, S.; Nebel, C. E.
• Is Part Of: Physica status solidi. Volume 211:Issue 10(2014:Oct.)
• Page Start: 2328
• Page End: 2332
• Publication Date: 2014-09-22
• Subjects: chlorine‐termination -- diamond -- fluorine‐termination -- inductively coupled plasma -- surface termination -- XPS; Solid state physics -- Periodicals; Solids -- Industrial applications -- Periodicals; 530.41
• DOI: 10.1002/pssa.201431188
• Languages: English
• ISSNs: 1862-6300

Abstract

Abstract : The surface termination of single crystalline diamond with fluorine and chlorine was investigated. The diamond was exposed to SF6 inductively coupled plasma for fluorination and to Cl2 plasma for chlorination. For the fluorine termination, the plasma treatment caused one monolayer of fluorine (measured with two angle photoelectron detection) and no carbonyl fluorides on the diamond surface. Furthermore no graphitization or roughening of the surface was observed. The plasma treatment with chlorine led to rough surfaces.