Static and dynamic evaluation of Silicon-On-Insulator-based scanning micromirrors. (6th May 2008)

• Record Type: Journal Article
• Authors: You, Jianliang; Bhaskar, Avinash K.; Packirisamy, Muthukumaran; Bhat, Rama B.
• Is Part Of: International journal of intelligent systems technologies and applications. Volume 5:Number 1/2(2008)
• Page Start: 185
• Page End: 200
• Publication Date: 2008-05-06
• Subjects: electrostatic performance -- microfabrication -- resonant frequency -- scanning micromirrors -- silicon-on-insulator -- SOI wafers -- vibrometers -- switching applications -- bulk micromachining -- statics -- dynamics -- optical micromirrors; Artificial intelligence -- Periodicals; Intelligent control systems -- Periodicals; 006.3
• Languages: English
• ISSNs: 1740-8865

Abstract

Microfabricated Silicon-On-Insulator (SOI) optical micromirrors are often used in switching applications due to their high reflectivity and low residual stress. In the present study, an industrial bulk micromachining technology based on SOI wafer called the MicraGEM SOI technique is used to fabricate the micromirror. Further, analytical studies were carried out for the static and dynamic characteristics, and are validated using experimental results. A test set-up comprising a laser source and Laser Doppler Vibrometer (LDV) was used for dynamic testing. The microfabrication and test method proposed are simple and can be used to study optical micromirrors of any size.