Virtual metrology-based engineering chain management by multi-classification of quality using support vector machine for semiconductor manufacturing. (24th June 2011)

• Record Type: Journal Article
• Authors: Arima, Sumika
• Is Part Of: International journal of industrial and systems engineering. Volume 8:Number 1(2011)
• Page Start: 1
• Page End: 18
• Publication Date: 2011-06-24
• Subjects: quality management -- VM -- virtual metrology -- semiconductor manufacturing -- ECM -- engineering chain management -- SVM -- support vector machine -- multi-classification -- quality prediction -- systems engineering; Systems engineering -- Periodicals; Industrial engineering -- Periodicals; 620.001171
• Languages: English
• ISSNs: 1748-5037

Abstract

This paper suggested that engineering chain management (ECM) that manages technical information and the process is necessary for the semiconductor industry. A virtual metrology-based (VM) manufacturing management system was proposed. This system realised the ECM concept, succeeded in real-time quality prediction and served a consistent driver to actions of all divisions of work. Support vector machine (SVM) was applied to construct an accurate VM model that provided multi-class quality prediction of the product. Although only the equipment variable data of a real mass production factory was used as an input, the VM model predicted with 100% accuracy the quality of the product.