Design and modelling of silicon MEMS accelerometer. (1st January 2013)

• Record Type: Journal Article
• Authors: Hrairi, Meftah; Baharom, Badrul Hanafi Bin
• Is Part Of: International journal of engineering systems modelling and simulation. Volume 5:Number 4(2013)
• Page Start: 181
• Page End: 187
• Publication Date: 2013-01-01
• Subjects: component -- micro electro mechanical systems -- MEMS -- finite element analysis -- FEA -- accelerometer -- design -- modelling; Engineering systems -- Computer simulation -- Periodicals; Engineering systems -- Mathematical models -- Periodicals; 620.0042
• Languages: English
• ISSNs: 1755-9758

Abstract

In developing micro electro mechanical systems (MEMS), finite element analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, the performance of the devices can be easily expanded, as well as reducing the time and cost of MEMS production. This paper focuses on the modelling of silicon MEMS accelerometer in an attempt to design a surface micro-machined accelerometer that satisfies certain pre-determined specifications.