Composites of Li-Al-B-Si-O glass and β-Al2O3 for LTCC-silicon heterogeneous integration applications. (November 2018)

• Record Type: Journal Article
• Authors: Chen, Guanyu; Liu, Zhifu; Ma, Mingsheng; Zhang, Faqiang; Li, Yongxiang; Wen, Zhaoyin; Wu, Xiangwei
• Is Part Of: Ceramics international. Volume 44(2018)Supplement 1
• Page Start: S141
• Page End: S144
• Publication Date: 2018-11
• Subjects: LABS glass -- β-Al2O3 -- LTCC -- Heterogeneous integration -- Anodic bonding; Ceramics -- Periodicals; Céramique industrielle -- Périodiques; Ceramics; Periodicals; Electronic journals; 666
• DOI: 10.1016/j.ceramint.2018.08.130
• Languages: English
• ISSNs: 0272-8842

Abstract

Abstract: Composites of Li-Al-B-Si-O (LABS) glass and β-Al2 O3 have been synthesized for low-temperature co-fired ceramics (LTCC) technology application. The main phase of sintered composites is Li2 Al2 Si3 O10 and β-Al2 O3 phase appears only when its content is higher than 35 wt%. The DC conductivities of sintered composites are all above 1 × 10 −8 S/cm at the temperature of 473 K. The activation energies of alkali ions of different composites are all between the conductivity measured perpendicular and parallel to the c-axis of Eucryptite, which proves the ionic conductance of composites is associated with the main phase of Li2 Al2 Si3 O10 . The CTE of the composites increased with the increase of β-Al2 O3 . The CTE of 68 wt% LABS glass-32 wt% β-Al2 O3 is 3.15 ppm/°C (25–300 °C), which matches that of silicon (3.2 ppm/°C, 25–300 °C) well. The results indicate that the composites of Li-Al-B-Si-O glass and β-Al2 O3 can be a promising material for LTCC-silicon heterogeneous integration with anodic bonding technology.