Energy dispersive x-ray spectroscopy for nanostructured thin film density evaluation. Issue 2 (8th April 2015)

• Record Type: Journal Article
• Authors: Prencipe, Irene; Dellasega, David; Zani, Alessandro; Rizzo, Daniele; Passoni, Matteo
• Is Part Of: Science and technology of advanced materials. Volume 16:Issue 2(2015)
• Publication Date: 2015-04-08
• Subjects: density evaluation -- thin film -- EDS -- foam -- areal density; 68.37.Hk -- 78.70.En; Materials -- Technological innovations -- Periodicals; 620.112
• DOI: 10.1088/1468-6996/16/2/025007
• Languages: English
• ISSNs: 1468-6996

Abstract

Abstract: In this paper, we report on two fast and non-destructive methods for nanostructured film density evaluation based on a combination of energy dispersive x-ray spectroscopy for areal density measurement and scanning electron microscopy (SEM) for thickness evaluation. These techniques have been applied to films with density ranging from the density of a solid down to a few, with different compositions and morphologies. The high resolution of an electron microprobe has been exploited to characterize non-uniform films both at the macroscopic scale and at the microscopic scale.