Visualized strain profile in the process of crystal ion slicing of LiTaO3. (15th April 2016)

• Record Type: Journal Article
• Authors: Ma, Changdong; Lu, Fei; Xu, Bo; Fan, Ranran
• Is Part Of: Journal of physics. Volume 49:Number 20(2016)
• Publication Date: 2016-04-15
• Subjects: LiTaO3 crystal -- ion co-implantation -- strain profile -- lattice damage; Physics -- Periodicals; 530
• DOI: 10.1088/0022-3727/49/20/205301
• Languages: English
• ISSNs: 0022-3727

Abstract

Abstract: LiTaO3 samples are implanted with 190KeV He and 110 KeV H with fluences in the range 2 × 10 16 –6 × 10 16 cm −2 at room temperature. Lattice damage and strain caused by ion implantation and their change with annealing temperature are characterized by Rutherford backscattering spectrometry, high resolution x-ray diffraction and transmission electron microscopy. Strain distributions are illustrated by comparing simulated x-ray diffractive curves to the experimental results. In contrast to a broad strain distribution in H implanted samples, strain distribution is very concentrated in He-only or He-first co-implanted samples. Microfractures are caused in He-first samples due to severe lattice damage and large lattice strain. The strong coalescence effect of He ions in co-implanted LiTaO3 is analyzed and the mechanism of built-up high normal strain is proposed.