Piezoelectric drive systems in ultraprecision machines: a review of the state-of-the-art. (5th May 2009)

• Record Type: Journal Article
• Authors: Logan, D.; Ahearne, E.; Byrne, G.
• Is Part Of: International journal of computational materials science and surface engineering. Volume 2:Number 1/2(2009)
• Page Start: 54
• Page End: 62
• Publication Date: 2009-05-05
• Subjects: ultraprecision machining -- piezoelectric actuators -- flexure systems -- drive systems -- precision control -- piezoelectric drives; Surfaces (Technology) -- Periodicals; Materials -- Computer simulation -- Periodicals; Materials -- Mathematical models -- Periodicals; 620.110151
• Languages: English
• ISSNs: 1753-3465

Abstract

The production of ultraprecision and micromachined components has been enabled by the development of a range of drive system technologies with commensurate resolution. In particular, systems based on piezoelectric actuators have provided an alternative to mechanical drive systems. These actuators have been incorporated in drive systems for high resolution positioning of atomic force microscopes, high frequency vibration compensation and high speed valves for diesel injection. The performance of systems based on piezo actuators is characterised by high electromechanical advantage, submillisecond response times and nanometric resolution. In many cases the inherent limited range of travel has been compensated by the design of flexure systems. When combined, these provide precision control free of friction and backlash, otherwise unattainable with conventional mechanical drives. The objective of this paper is to give an overview of the current state-of-the-art. It will highlight the novel application of these alternative technologies. The advantages of piezoelectric technology and their limitations will be discussed.