Cite
HARVARD Citation
Murano, M. et al. (2018). Effect of pulse parameter change on a-SiCN diaphragms for environmental cells fabricated by magnetic-field- and pulsed-plasma-enhanced chemical vapor deposition. Vacuum. pp. 60-64. [Online].
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Murano, M. et al. (2018). Effect of pulse parameter change on a-SiCN diaphragms for environmental cells fabricated by magnetic-field- and pulsed-plasma-enhanced chemical vapor deposition. Vacuum. pp. 60-64. [Online].