Thermal properties of modified carbon films. Issue 1 (1st February 2016)

• Record Type: Journal Article
• Authors: Kalenik, Jerzy; Kielbasinski, Konrad; Firek, Piotr; Czerwosz, Elżbieta; Szmidt, Jan
• Is Part Of: Circuit world. Volume 42:Issue 1(2016)
• Page Start: 37
• Page End: 41
• Publication Date: 2016-02-01
• Subjects: Carbon films deposition -- Hydrogen sensors -- Palladium-carbon films; Electronic circuits -- Design and construction -- Periodicals; Electronic circuits -- Periodicals; 621.381505
• DOI: 10.1108/CW-10-2015-0055
• Languages: English
• ISSNs: 0305-6120

Abstract

Abstract : Purpose: – The purpose of this paper is to present thermal properties of palladium-carbon films prepared by physical vapour deposition (PVD)/chemical vapour deposition (CVD) methods. Design/methodology/approach: – Thin palladium-carbon films were prepared at Tele- and Radioresearch Institute. Test structures containing palladium-carbon films and titanium electrodes were made. Temperature-resistance characteristics were measured. Findings: – The results show strong temperature dependence of modified carbon film resistance. The dependence is stable, and so modified carbon films can be applied for various electronic applications. Originality/value: – The paper presents thermal properties of thin palladium-carbon prepared by original PVD/CVD method at Tele- and Radioresearch Institute.