CMOS Integrated Nanocrystalline SnO2 Gas Sensors for CO Detection. (2016)

• Record Type: Journal Article
• Authors: Lackner, E.; Krainer, J.; Wimmer-Teubenbacher, R.; Sosada, F.; Gspan, C.; Rohracher, K.; Wachmann, E.; Koeck, A.
• Is Part Of: Procedia engineering. Volume 168(2016)
• Page Start: 297
• Page End: 300
• Publication Date: 2016
• Subjects: CMOS integration -- gas sensors -- tin dioxide ultrathin film -- microhotplates -- carbon monoxide; Engineering -- Congresses; Engineering -- Periodicals; Engineering; Conference proceedings; Periodicals; 620.005
• DOI: 10.1016/j.proeng.2016.11.200
• Languages: English
• ISSNs: 1877-7058

Abstract

Abstract: In this work, we present gas sensors based on nanocrystalline SnO2 ultrathin films, which were integrated on microhotplate chips fabricated by CMOS technology. The gas sensitive films, with a thickness of 50nm, were deposited on the microhotplate by a spray pyrolysis process. The CMOS integrated sensor resistance was significantly decreased in the presence of carbon monoxide. A sensor response of up to 50% is achieved at an operating temperature of 375̊C. The microhotplate chips presented here enable 3D integration of different gas sensing systems by through-silicon-via technology. Such 3D-integrated nanosensors are promising candidates for building smart gas sensor devices for daily life applications.