Cite
HARVARD Citation
Chang, J. et al. (2010). A negative residual stress gradient based micro bridge mechanism for on-chip lifting of micro structures. International journal of abrasive technology. pp. 165-173. [Online].
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Chang, J. et al. (2010). A negative residual stress gradient based micro bridge mechanism for on-chip lifting of micro structures. International journal of abrasive technology. pp. 165-173. [Online].