A disturbance-free surface profile measuring system with sinusoidal phase integrating-bucket modulation. (January 2015)

• Record Type: Journal Article
• Authors: Fan, Feng; En, Bo; Chang-rong, Lv; Zhen-yu, Deng; Xiao, Fu; Ting-ting, Huang; Fa-jie, Duan
• Is Part Of: Measurement. Volume 60(2015:Feb.)
• Page Start: 207
• Page End: 213
• Publication Date: 2015-01
• Subjects: Profile reconstruction -- Fiber-optic interference -- SPM -- Phase compensation -- Fringe projection; Weights and measures -- Periodicals; Measurement -- Periodicals; Measurement; Weights and measures; Periodicals; 530.8
• DOI: 10.1016/j.measurement.2014.10.013
• Languages: English
• ISSNs: 0263-2241

Abstract

Highlights: A closed-loop phase compensation system with sinusoidal phase integrating-bucket modulation has been built up. A high-efficiency phase extraction method has been described instead of phase generated carrier method. By measuring the surface profile of an aluminum plate for twice, the repeatability is estimated to be λ/69. Abstract: A surface profile measuring system based on fringe projection and sinusoidal phase integrating-bucket modulation has been thoroughly studied and described in detail. Fringe projection can be achieved using Mach–Zehnder interferometer structure and Young's double pinhole principle. Sinusoidal phase modulation can be achieved by driving the piezoelectric transducer with a cosine voltage signal. To achieve a good insensitivity to disturbances, we build up a feedback subsystem for phase compensation, and a disturbance-free performance can be achieved with a phase stability of 5.25 mrad for fringes, which is conducive to the high-resolution surface profile measurement. By measuring the surface profile of an aluminum plate for twice over an interval of 10 min, the repeatability is about 13 nm. Experiment results confirm that the proposed profile measuring system is applicable for practical application with high accuracy.