Design and Fabrication of an Electrode for Low-actuation-Voltage Electrowetting-on-Dielectric Devices. (2015)

• Record Type: Journal Article
• Authors: Samad, M.F.; Kouzani, A.Z.; Rahman, M.M.; Magniez, K.; Kaynak, A.
• Is Part Of: Procedia technology. Volume 20(2015)
• Page Start: 20
• Page End: 25
• Publication Date: 2015
• Subjects: electrowetting on dielectic (EWOD) -- electrode -- actuation voltage -- photolithography -- dielectric layer -- hydrophobic layer.; Technology -- Congresses; Technology -- Periodicals; Engineering -- Congresses; Engineering -- Periodicals; Engineering; Technology; Conference proceedings; Periodicals; 605
• DOI: 10.1016/j.protcy.2015.07.005
• Languages: English
• ISSNs: 2212-0173

Abstract

Abstract: This paper presents the design and fabrication of an electrode for low-actuation-voltage electrowetting-on-dielectric (EWOD) devices. The electrode which takes advantage of a novel shape is used to develop an EWOD device. The fabrication process for the electrode and the device development includes laser exposure, wet developing, etching, and stripping. A dielectric layer of 5% (wt./wt.) Polyvinylidene difluoride (PVDF) is used for the electrode insulation. In addition, a very thin (50 nm) layer of Teflon is coated on the EWOD surface to provide hydrophobicity. It is observed that a thin and high dielectric-constant layer can reduce the actuation voltage in the EWOD device. An actuation voltage of 14.8 V was achieved by the EWOD device.