Gentle quantitative measurement of helium density in nanobubbles in silicon by spectrum imaging. (October 2015)

• Record Type: Journal Article
• Authors: Alix, Kévin; David, Marie-Laure; Lucas, Guillaume; Alexander, Duncan T.L.; Pailloux, Frédéric; Hébert, Cécile; Pizzagalli, Laurent
• Is Part Of: Micron. Volume 77(2015:Oct.)
• Page Start: 57
• Page End: 65
• Publication Date: 2015-10
• Subjects: EELS -- EFTEM -- Spectrum imaging -- Helium bubbles -- Implantation; Microscopy -- Periodicals; Electron Probe Microanalysis -- Periodicals; Microscopy -- Periodicals; Microscopie -- Périodiques; Microscopy; Periodicals; 502.82
• DOI: 10.1016/j.micron.2015.05.011
• Languages: English
• ISSNs: 0968-4328

Abstract

Abstract : Highlights: Helium density determination in individual nanobubbles using EFTEM spectrum imaging. No helium detrapping under the electron beam. Helium density map can be obtained over dozens of bubbles at a time. Abstract: We propose an original method for the determination of the physical properties of nanometer sized helium bubbles using spectrum imaging in an energy-filtered transmission electron microscope. Helium bubbles synthesized by high fluence implantation and thermal annealing in silicon are investigated. The acquisition parameters are determined to optimize both signal/noise ratio and time. The limitations to the extent of observable areas on a typical sample are explained. The necessary data correction and helium K-edge position measurement procedures are detailed and the accuracy of the method is discussed. Finally helium density maps are obtained and discussed.