27.2: The Fabrication of Novel PSVA Pixel Structure by GTM Technology. Issue 1 (June 2015)
- Record Type:
- Journal Article
- Title:
- 27.2: The Fabrication of Novel PSVA Pixel Structure by GTM Technology. Issue 1 (June 2015)
- Main Title:
- 27.2: The Fabrication of Novel PSVA Pixel Structure by GTM Technology
- Authors:
- Deng, Zhuming
Zhao, Feng
Chiu, Chung‐Yi
Wu, Yuzhi
Gan, Qiming
Lee, Chia‐Yu
Lo, Chang‐Cheng
Lien, Alan - Abstract:
- Abstract : The novel polymer‐stabilized vertical alignment (PSVA) pixel structure was fabricated by gray tone mask (GTM) technology. With the GTM technology, one mask is reduced and the process is simplified. The influence of process parameters on groove structure have been researched in detail.
- Is Part Of:
- Digest of technical papers. Volume 46:Issue 1(2015)
- Journal:
- Digest of technical papers
- Issue:
- Volume 46:Issue 1(2015)
- Issue Display:
- Volume 46, Issue 1 (2015)
- Year:
- 2015
- Volume:
- 46
- Issue:
- 1
- Issue Sort Value:
- 2015-0046-0001-0000
- Page Start:
- 386
- Page End:
- 389
- Publication Date:
- 2015-06
- Subjects:
- GTM -- PSVA -- Dry etch rate -- Groove depth
Information display systems -- Congresses
621.3815422 - Journal URLs:
- http://catalog.hathitrust.org/api/volumes/oclc/1799368.html ↗
http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)2168-0159 ↗
http://ojps.aip.org/dbt/dbt.jsp?KEY=SIDSYM ↗
http://sid.aip.org/digest ↗
http://onlinelibrary.wiley.com/ ↗ - DOI:
- 10.1002/sdtp.10355 ↗
- Languages:
- English
- ISSNs:
- 0097-966X
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 8271.680000
British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store - Ingest File:
- 8206.xml