10.4: Non‐Contact Current Measurements for AMOLED Backplanes Using Electron‐Beam‐Induced Plasma Probes. Issue 1 (June 2015)
- Record Type:
- Journal Article
- Title:
- 10.4: Non‐Contact Current Measurements for AMOLED Backplanes Using Electron‐Beam‐Induced Plasma Probes. Issue 1 (June 2015)
- Main Title:
- 10.4: Non‐Contact Current Measurements for AMOLED Backplanes Using Electron‐Beam‐Induced Plasma Probes
- Authors:
- Saleh, Ned
Sterling, Enrique
Toet, Daniel - Abstract:
- Abstract : We present the first demonstration of a proprietary non‐contact atmospheric electron beam‐induced plasma probe technique for current‐based electrical characterization of flat panel display backplanes. Accurate I‐V curves were measured and single line defect sensitivity was demonstrated. This technology is expected to greatly benefit AMOLED display fabrication yields.
- Is Part Of:
- Digest of technical papers. Volume 46:Issue 1(2015)
- Journal:
- Digest of technical papers
- Issue:
- Volume 46:Issue 1(2015)
- Issue Display:
- Volume 46, Issue 1 (2015)
- Year:
- 2015
- Volume:
- 46
- Issue:
- 1
- Issue Sort Value:
- 2015-0046-0001-0000
- Page Start:
- 118
- Page End:
- 121
- Publication Date:
- 2015-06
- Subjects:
- AMOLED -- TFT array -- plasma -- display testing -- non‐contact -- current measurements -- electron beam
Information display systems -- Congresses
621.3815422 - Journal URLs:
- http://catalog.hathitrust.org/api/volumes/oclc/1799368.html ↗
http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)2168-0159 ↗
http://ojps.aip.org/dbt/dbt.jsp?KEY=SIDSYM ↗
http://sid.aip.org/digest ↗
http://onlinelibrary.wiley.com/ ↗ - DOI:
- 10.1002/sdtp.10306 ↗
- Languages:
- English
- ISSNs:
- 0097-966X
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 8271.680000
British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store - Ingest File:
- 8205.xml