Surface reconstructions of (0001) AlN during metal‐organic vapor phase epitaxy. Issue 8 (14th June 2017)

• Record Type: Journal Article
• Authors: Pristovsek, Markus; Bellman, Konrad; Mehnke, Frank; Stellmach, Joachim; Wernicke, Tim; Kneissl, Michael
• Is Part Of: Physica status solidi. Volume 254:Issue 8(2017)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2017-06-14
• Subjects: AlN -- Ellipsometry -- MOVPE -- surface reconstruction -- surfaces; Solid state physics -- Periodicals; Solids -- Periodicals; Atomic structure -- Periodicals; 530.41
• DOI: 10.1002/pssb.201600711
• Languages: English
• ISSNs: 0370-1972

Abstract

Abstract: We observed (0001) AlN wurzite surfaces by atomic force microscopy after 500 nm regrowth in metal‐organic vapor phase epitaxy. The steps changed from double to single height with decreasing V/III ratio. The single height step edges were alternating smooth and rough due to the two different step types on (0001) wurzite surfaces. By reducing the V/III ratio, the widths equalize for terraces with smooth and rough edges, until Al terminated steps start to dominate, and thus promote again double height steps. Using in situ ellipsometry at λ = 400 nm under static conditions, we could directly identify three different surface reconstructions at high NH 3, low NH 3, and without NH 3 which correlates with the different step terminations.