57‐5: Invited Paper: Excimer Laser Annealing and Spot‐Beam Crystallization of Si Films for Advanced Displays. Issue 1 (30th May 2018)

• Record Type: Journal Article
• Authors: Im, James S.; Song, Ruobing; Wong, Vernon K.; Pan, Wenkai; Choi, Insung; Yu, Miao
• Is Part Of: Digest of technical papers. Volume 49:Issue 1(2018)
• Page Start: 762
• Page End: 763
• Publication Date: 2018-05-30
• Subjects: LTPS -- ELA -- Laser Annealing -- Spot-Beam Crystallization -- Fiber Laser Annealing -- Sequential Lateral Solidification; Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/sdtp.12353
• Languages: English
• ISSNs: 0097-966X

Abstract

Abstract : This paper discusses recent laser‐crystallization‐related research results and advances that are enabling us to: (1) gain an in‐depth understanding of the ELA method currently utilized in the industry, and (2) suggest that a quasi‐CW fiber‐laser‐based SBC technique can be developed into a viable laser annealing method.