57‐4: Experimental Demonstration of Quasi‐CW SBC of Si Films Using Ultra‐High‐Frequency UV Fiber Lasers. Issue 1 (30th May 2018)

• Record Type: Journal Article
• Authors: Song, Ruobing; Choi, Insung; Pan, Wenkai; Yu, Miao; Im, James S.
• Is Part Of: Digest of technical papers. Volume 49:Issue 1(2018)
• Page Start: 759
• Page End: 761
• Publication Date: 2018-05-30
• Subjects: LTPS -- ELA -- Laser Annealing -- Spot-Beam Crystallization -- Fiber Laser Annealing; Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/sdtp.12350
• Languages: English
• ISSNs: 0097-966X

Abstract

Abstract : The Q‐SBC method is a new laser annealing process. It is technically and procedurally quite distinct from, and as a result possesses certain process‐ and material‐related benefits compared to, the existing line‐beam and/or excimer‐laser‐based techniques. Here, we present preliminary yet definitive Q‐SBC experimental results (obtained using an ultra‐high‐frequency UV fiber laser) that support the foundational concept of the method, and demonstrate further that ELA‐generated‐like polycrystalline Si films can be obtained using the SB‐FLA version of the Q‐SBC approach.